Silicon Run Lithography Part of the Series: Silicon Run Series
Silicon Run Lithography examines the role of photolithography in imaging and printing the many intricate layers of integrated circuits. Focusing on critical and non-critical mask levels of a CMOS transistor, this video takes a close look at the manufacturing materials, tools, and processes that have made more precise and complex submicron lithography possible. Silicon Run Lithography shows how mask patterns are greatly reduced and precisely positioned on silicon wafers using "step and repeat" and "step and scan" exposure processes.
Running Time
31 mins
Year
1999
Kanopy ID
1132928
Languages
Subjects
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